


安捷伦ICP-MS半导体氟喷雾进样套件(铂金版)
Compatible Models: 7850/7900/8900
Recommended Applications: Semiconductor
适用机型:安捷伦7850/7900/8900 推荐应用场景:半导体行业
The Fluorospray Semiconductor Sample Introduction Kit is a high-purity, high-stability sample introduction system designed specifically for ICP-MS, offering exceptional performance in even the most demanding applications. Engineered for ultrapure chemical monitoring in semiconductor fabs, Fluorospray ensures ultra-low detection limits and outstanding short- and long-term stability. Its innovative spray chamber design enhances matrix tolerance while maintaining ultra-low backgrounds across all elements. Built for continuous 24/7 operation, Fluorospray excels in HF resistance and provides reliable, accurate results for critical analysis in highly sensitive environments.
Includes PFA Fluorospray Chamber, PFA Endcap, Two Addition Gas Ports, PFA Injector Connector, Gas and Drain Lines, SilQ Oring-free torch and Fluorobore Pt injector (available in 1.0 mm, 1.5 mm, 2.0 mm or 2.5 mm ID) with Platinum Shield.
Benefits
· High Stability
· High Performing
· High Sensitivity
· Ultraclean
· Chemically Resistant
该款氟喷雾半导体样品进样系统专为ICP-MS设计,采用高纯度、高稳定性技术,即使在严苛工况下也能保持卓越性能。该系统专为半导体制造厂的超纯化学物质检测而研发,具备超低检测限和优异的短期/长期稳定性。创新喷雾腔设计有效提升基质兼容性,同时确保所有元素检测背景值极低。氟喷雾系统支持全天候连续运行,在高灵敏度环境中能为关键分析提供可靠精准的结果,其抗氢氟酸腐蚀性能尤为突出。
包括PFA氟喷雾室、PFA端盖、两个添加气体端口、PFA注射器连接器、气体和排水管路、超高纯石英炬管和带铂屏蔽的 Pt中心管(有1.0 mm、1.5 mm、2.0 mm或2.5 mm内径可选)。
优势高稳定性、高性能、高灵敏度、超洁净、耐化学腐蚀。